Economical fabrication of graphite/paper-based humidity sensor
نویسندگان
چکیده
منابع مشابه
Low temperature formation Silver-Copper alloy nanoparticles using hydrogen plasma treatment for fabrication of humidity sensor
In this paper, a novel method of producing bi-metallic alloy nanoparticles at low temperatures using hydrogen bombardment of thin films, deposited on glass substrates, is introduced. Optical and morphological characteristics of the nanoparticles were extensively studied for various conditions of plasma treatment, such as plasma power density, temperature, duration of hydrogen bombardment, thick...
متن کاملLow temperature formation Silver-Copper alloy nanoparticles using hydrogen plasma treatment for fabrication of humidity sensor
In this paper, a novel method of producing bi-metallic alloy nanoparticles at low temperatures using hydrogen bombardment of thin films, deposited on glass substrates, is introduced. Optical and morphological characteristics of the nanoparticles were extensively studied for various conditions of plasma treatment, such as plasma power density, temperature, duration of hydrogen bombardment, thick...
متن کاملFabrication and Characterization of a CMOS-MEMS Humidity Sensor
This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of...
متن کاملMEMS Capacitive Relative Humidity Sensor Design, Fabrication, and Characterization
The motivating principle behind this research is the development of a small, wearable sensor that would use humidity and temperature measurements as metrics for health monitoring. We have successfully fabricated macro-scale devices via pressing of a polymer between two aluminum plates, and the responses of these capacitors were tested in various humidity conditions. The transition from macro to...
متن کاملFabrication and Evaluation of a Graphene Oxide-Based Capacitive Humidity Sensor
In this study, a CMOS compatible capacitive humidity sensor structure was designed and fabricated on a 200 mm CMOS BEOL Line. A top Al interconnect layer was used as an electrode with a comb/serpent structure, and graphene oxide (GO) was used as sensing material. XRD analysis was done which shows that GO sensing material has a strong and sharp (002) peak at about 10.278°, whereas graphite has (...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Indonesian Journal of Electrical Engineering and Computer Science
سال: 2020
ISSN: 2502-4760,2502-4752
DOI: 10.11591/ijeecs.v20.i1.pp54-59